ACKNOWLEDGEMENT

In the name of Allah, all praises to Allah for the strengths, health and His blessing in completing this dissertation. Because of these things, I can finish this dissertation in order to fulfill of the requirement for the Doctoral degree from both Universitas Indonesia and Universite Lille 1, France.

I would like to convey my sincere gratitude to Prof. Dr. Nji Raden Poespawati, MT. and Dr. Ir. Retno Wigajatri Purnamaningsih for their guidance, support, encouragement, trust, and in particular their patience throughout this work. I appreciate all their contributions of time and ideas to ensure this dissertation in a good quality.

I wish to express my profoundest sentiments to my supervisor and co supervisor in Lille, Prof. Elhadj Dogheche and Prof. Didier Decoster, for their assistance, supports and kindness during my study at Institute Electronic, Microelectronic and Nanotechnology (IEMN). They made my study and my live in France become much easier and enjoyable. 

I am also very grateful to Electrical Engineering Department and Engineering Faculty Universitas Sultan Ageng Tirtayasa for their continuous support from beginning until the end of my study.

I would like to thanks and appreciate for the scholarship provided by Indonesian Government (DIKTI) during my four years study, as well as France Government (BGF) for the scholarship during my study in France, that made my PhD work possible.

I acknowledge the assistance of my colleagues in IEMN, Arnaud Stolz, Floriane Leroy, Mathieu Halbwax, and Djamilla Chefri especially during my experiment and my study.

Thank you for Suk Min Ko and Prof. Yoo Hoon Cho (Korea Advanced Institute of Science and Technology/KAIST) for your help, your time and your samples for my experiment.

I am thankfull to Prof. Dimitris Pavlidis (Darmstadt Technical University/ DTU, German) for your samples for my experiment.

I am also appreciative to Charlene Brillard and Dominique Deresmes for AFM, Christophe Bayaval for SEM, Pascal Roussel for XRD, David Troadec and Ahmed Addad for TEM.

I greatly appreciate to Mireille Cuniot-Ponsard, for letting me doing my experimental works using goniometri technique at Institut d’Optique Graduate School, Paris France.

Sincere thanks to my colleagues in IEMN (Aurélien Gauthier-Brun, Basma Al Zein, Thomas Aviles, Edy W., Naima S., Bandar Alshehri, Matthieu P., Noura Gasmi, Sabah Benzeghda), my friends in UI (Hendriko, Toha S., M. Yusro, Dadiek P., Rushendra R., Surya D., Riana R.L, Harris S, Mona Arif, Mahyunir, Ulmiah M., Lita B., Jefrie B., Dimas N., Dwinanti, Agri, Said Z, Tuti, Rudi H., Aliyah), S. Ardiyanti, Yuni W., Tiyuk S., Sapto Nugroho, Maula S., Alberth, Deasy Emalia, Stieven Rumokoy and  also those who indirectly contributed in this research, your kindness means a lot to me. Thank you very much.

My deepest gratitude goes to My Parents, for their endless love, encouragement and prayers.    

Last but not least, I would like to dedicate this dissertation to my beloved family, my husband Untung Mardono, my childrens: Daiyan Uthsa Rafif, Marsha Auriella Syafwan and Aicha Maziidatul Muthiah, my sister Mulyarti Akyunin, my brother Aji Mahardika and Arief Wuryanto for their love, patience, and understanding.  

Depok, 14 Januari 2016

                                                                                                                      Irma Saraswati